Handbook of Thin Film Process Technology 98/1 Reactive...

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Handbook of Thin Film Process Technology 98/1 Reactive sputtering

Name: Handbook of Thin Film Process Technology 98/1 Reactive sputtering
ISBN: 9781351072786

Westwood, William Dickson, D Glocker, S Shah

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The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. The main work is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and academic researchers in addition to owners of the main Handbook. Some recent developments in the reactive sputtering field are covered, including unbalanced magnetron sputtering and pulsed reactive sputtering. The articles contain a wealth of practical information relating to applications, practice and manufacturing techniques

سب زمرہ:

Engineering

سال:

1998

اشاعت:

ناشر کتب:

Institute of Physics Publishing;CRC Press

زبان:

english

صفحات:

ISBN 10:

1351072781